Synchronization of microelectromechanical system (MEMS) mirrors

    公开(公告)号:US11307403B2

    公开(公告)日:2022-04-19

    申请号:US16376544

    申请日:2019-04-05

    Abstract: A multi-mirror system includes a first mirror configured to oscillate about a first axis; a second mirror configured to oscillate about a second axis; a first driver configured to drive an oscillation of the first mirror, detect first zero-crossing events of the first mirror, and generate a first position signal based on the detected first zero-crossing events; a second driver configured to drive an oscillation of the second mirror, detect second zero-crossing events of the second mirror, and generate a second position signal based on the detected second zero-crossing events; and a synchronization controller configured to receive the first and the second position signals, and synchronize at least one of a phase or a frequency of the oscillation of the second mirror with at least one of a phase or a frequency of the oscillation of the first mirror, respectively, based on the first and the second position signals.

    Monitoring of MEMS mirror properties

    公开(公告)号:US11073686B2

    公开(公告)日:2021-07-27

    申请号:US16919326

    申请日:2020-07-02

    Abstract: Systems and methods are provided for monitoring properties of a microelectromechanical systems (MEMS) oscillating structure. A system includes a MEMS oscillating structure configured as a non-linear resonator to oscillate about a rotation axis; a driver configured to generate a driving force for driving the MEMS oscillating structure about the rotation axis according to an operating response curve during which the MEMS oscillating structure is in resonance, the driver further configured to decrease the driving force when the MEMS oscillating structure is at a predefined tilt angle to induce an oscillation decay of the MEMS oscillating structure; a measurement circuit configured to measure an oscillation frequency and a tilt angle amplitude of the MEMS oscillating structure during a decay period; and processing circuitry configured to determine at least one characteristic of the MEMS oscillating structure based on at least one of the measured oscillation frequency and the measured tilt angle amplitude.

    Oversamplng and transmitter shooting pattern for light detection and ranging (LIDAR) system

    公开(公告)号:US11796642B2

    公开(公告)日:2023-10-24

    申请号:US16364604

    申请日:2019-03-26

    CPC classification number: G01S7/4817 G01S17/04

    Abstract: A Light Detection and Ranging (LIDAR) system includes a LIDAR transmitter and a controller. The LIDAR transmitter, driven by the controller, scans a field of view with laser beams, where each laser beam has a beam width that, when projected into a field of view, coincides with an angle region of the field of view. The LIDAR transmitter transmits a first plurality of laser beams in a first scan, where a first plurality of angle regions covered by the first plurality of laser beams are mutually exclusive of each other. The LIDAR transmitter transmits a second plurality of laser beams in a second scan, where a second plurality of angle regions covered by the second plurality of laser beams are mutually exclusive of each other. Each of the second plurality of angle regions partially overlaps with a different corresponding one of the first plurality of angle regions.

    Dirt detector on a LIDAR sensor window

    公开(公告)号:US11550044B2

    公开(公告)日:2023-01-10

    申请号:US16744886

    申请日:2020-01-16

    Abstract: A sensor module includes a window structure configured to permit the passage of transmitted light and received light between an inside of the sensor module and a field-of-view; a transmitter configured to transmit a transmit light beam; a scanning structure configured to rotate about at least one scanning axis, the scanning structure configured to receive the transmit light beam from the transmitter and direct the transmit light beam towards the window structure and the field-of-view; a light detector configured to detect a reflected light beam that corresponds to the transmit light beam; and at least one processor configured to measure a time-of-flight of a round trip light beam comprising of the transmit light beam and the reflected light beam, compare the time-of-flight to a threshold time, and detect a dirt formation on the window structure on a condition that the time-of-flight is less than the threshold time.

    Synchronization of microelectromechanical system (MEMS) mirrors

    公开(公告)号:US12001010B2

    公开(公告)日:2024-06-04

    申请号:US17690149

    申请日:2022-03-09

    CPC classification number: G02B26/0841 G01S7/4817 G02B26/101

    Abstract: An oscillator system includes an oscillator structure configured to oscillate about a first axis according to a first oscillation and oscillate about a second axis according to a second oscillation; a first driver configured to drive the first oscillation, detect first zero-crossing events of the first mirror, and generate a first position signal based on the detected first zero-crossing events; a second driver configured to drive the second oscillation, detect second zero-crossing events of the second mirror, and generate a second position signal based on the detected second zero-crossing events; and a synchronization controller configured to receive the first and the second position signals, and synchronize at least one of a phase or a frequency of the second oscillation with at least one of a phase or a frequency of the first oscillation, respectively, based on the first and the second position signals.

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