Invention Grant
- Patent Title: 3-dimensional NOR memory array architecture and methods for fabrication thereof
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Application No.: US17011836Application Date: 2020-09-03
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Publication No.: US11309331B2Publication Date: 2022-04-19
- Inventor: Eli Harari , Scott Brad Herner , Wu-Yi Henry Chien
- Applicant: Sunrise Memory Corporation
- Applicant Address: US CA Fremont
- Assignee: Sunrise Memory Corporation
- Current Assignee: Sunrise Memory Corporation
- Current Assignee Address: US CA Fremont
- Agency: VLP Law Group, LLP
- Agent Edward C. Kwok
- Main IPC: H01L21/00
- IPC: H01L21/00 ; H01L27/11582 ; H01L21/768 ; H01L23/00 ; H01L27/11578 ; H01L21/311 ; G11C16/04

Abstract:
A method addresses low cost, low resistance metal interconnects and mechanical stability in a high aspect ratio structure. According to the various implementations disclosed herein, a replacement metal process, which defers the need for a metal etching step in the fabrication process until after all patterned photoresist is no longer present. Under this process, the conductive sublayers may be both thick and numerous. The present invention also provides for a strut structure which facilitates etching steps on high aspect ratio structures, which enhances mechanical stability in a high aspect ratio memory stack.
Information query
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