Invention Grant
- Patent Title: Semiconductor device
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Application No.: US17070074Application Date: 2020-10-14
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Publication No.: US11316012B2Publication Date: 2022-04-26
- Inventor: Koichi Nishita , Masaki Takeuchi , Yutaka Takeshima , Kazuhiro Inoue
- Applicant: Murata Manufacturing Co., Ltd.
- Applicant Address: JP Nagaokakyo
- Assignee: Murata Manufacturing Co., Ltd.
- Current Assignee: Murata Manufacturing Co., Ltd.
- Current Assignee Address: JP Nagaokakyo
- Agency: ArentFox Schiff LLP
- Priority: JPJP2020-006117 20200117
- Main IPC: H01L29/06
- IPC: H01L29/06

Abstract:
A semiconductor device that includes a semiconductor substrate having a first main surface and a second main surface facing each other in a thickness direction, the first main surface including a trench. The trench has a predetermined depth in the thickness direction and has a substantially wedge shape that has a first side surface and a second side surface that face each other and are not parallel to each other, and a first end surface and a second end surface that face each other and are substantially parallel to each other. The first side surface and the second side surface intersect each other at a line, or extension surfaces of the first side surface and the second side surface extended in the thickness direction intersect each other at a line, and the line extends in a first direction that does not align with a cleavage plane of the semiconductor substrate.
Public/Granted literature
- US20210226007A1 SEMICONDUCTOR DEVICE Public/Granted day:2021-07-22
Information query
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