Invention Grant
- Patent Title: Image sensor
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Application No.: US16415064Application Date: 2019-05-17
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Publication No.: US11322530B2Publication Date: 2022-05-03
- Inventor: Gang Zhang
- Applicant: Samsung Electronics Co., Ltd.
- Applicant Address: KR Suwon-si
- Assignee: Samsung Electronics Co., Ltd.
- Current Assignee: Samsung Electronics Co., Ltd.
- Current Assignee Address: KR Suwon-si
- Agency: Harness, Dickey & Pierce, P.L.C.
- Priority: KR10-2018-0065529 20180607
- Main IPC: H01L27/146
- IPC: H01L27/146 ; H01L27/148 ; H01L27/142

Abstract:
Provided is an image sensor including a semiconductor substrate having a first surface and a second surface opposite each other, an organic photoelectric conversion device on the first surface of the semiconductor substrate, a through electrode structure connected to the organic photoelectric conversion device, and a pixel separation structure extending from the first surface toward the second surface of the semiconductor substrate. The semiconductor substrate may include a photoelectric conversion region in the semiconductor substrate. The pixel separation structure may surround the photoelectric conversion region when viewed in plan. The pixel separation structure may include a separation conductive pattern and a first sidewall dielectric pattern. The first sidewall dielectric pattern may continuously extend from between the separation conductive pattern and the semiconductor substrate to between the semiconductor substrate and a sidewall of the through electrode structure. A portion of the pixel separation structure penetrated by the through electrode structure.
Information query
IPC分类: