Invention Grant
- Patent Title: Acoustic wave resonator
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Application No.: US16989129Application Date: 2020-08-10
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Publication No.: US11323088B2Publication Date: 2022-05-03
- Inventor: Tae Kyung Lee , Tae Yoon Kim , Sang Kee Yoon , Chang Hyun Lim , Jong Woon Kim , Moon Chul Lee
- Applicant: Samsung Electro-Mechanics Co., Ltd.
- Applicant Address: KR Suwon-si
- Assignee: Samsung Electro-Mechanics Co., Ltd.
- Current Assignee: Samsung Electro-Mechanics Co., Ltd.
- Current Assignee Address: KR Suwon-si
- Agency: NSIP Law
- Priority: KR10-2017-0036738 20170323
- Main IPC: H03H9/02
- IPC: H03H9/02 ; H03H9/54 ; H03H9/17 ; H03H9/13 ; H01L41/053 ; H01L41/29 ; H01L41/31 ; H03H3/02

Abstract:
An acoustic wave resonator includes a resonating part disposed on and spaced apart from a substrate by a cavity, the resonating part including a membrane layer, a first electrode, a piezoelectric layer, and a second electrode that are sequentially stacked. 0 Å≤ΔMg≤170 Å may be satisfied, ΔMg being a difference between a maximum thickness and a minimum thickness of the membrane layer disposed in the cavity.
Public/Granted literature
- US20200373899A1 ACOUSTIC WAVE RESONATOR Public/Granted day:2020-11-26
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