- 专利标题： MEMS actuation system
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申请号： US16256495申请日： 2019-01-24
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公开(公告)号： US11327276B2公开(公告)日： 2022-05-10
- 发明人: Guiqin Wang , Xiaolei Liu , Matthew Ng
- 申请人： MEMS Drive (Nanjing) Co., Ltd.
- 申请人地址： CN Nanjing
- 专利权人： MEMS Drive (Nanjing) Co., Ltd.
- 当前专利权人： MEMS Drive (Nanjing) Co., Ltd.
- 当前专利权人地址： CN Nanjing
- 代理机构： Holland & Knight LLP
- 代理商 Brian J. Colandreo; Michael T. Abramson
- 主分类号： G02B13/00
- IPC分类号： G02B13/00 ; G02B7/09 ; G03B17/00 ; H01L41/09 ; G03B13/32 ; H02N1/00 ; H02N2/02
摘要：
A multi-axis MEMS assembly includes a micro-electrical-mechanical system (MEMS) actuator configured to provide linear three-axis movement. The micro-electrical-mechanical system (MEMS) actuator includes: an in-plane MEMS actuator, and an out-of-plane MEMS actuator. An optoelectronic device is coupled to the micro-electrical-mechanical system (MEMS) actuator. The out-of-plane MEMS actuator includes a multi-morph piezoelectric actuator.
公开/授权文献
- US20190227266A1 MEMS Actuation System 公开/授权日：2019-07-25
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