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公开(公告)号：US20240345383A1
公开(公告)日：2024-10-17
申请号：US18393007
申请日：2023-12-21
发明人： Xiaolei Liu , Guiqin Wang
CPC分类号： G02B26/0858 , H02N2/028 , H02N2/062 , H04N23/54 , H04N23/687
摘要： A MEMS imaging actuator assembly includes: a first structural assembly; a second structural assembly; and a tip-tilt displacement assembly, configured to position the first structural assembly with respect to the second structural assembly, including: one or more multi-morphic thin film actuator assemblies, and one or more motion control assemblies; wherein one of the structural assemblies is configured to mount an optical device.
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公开(公告)号：US20230236341A1
公开(公告)日：2023-07-27
申请号：US18158017
申请日：2023-01-23
发明人： Xiaolei Liu , Guiqin Wang
CPC分类号： G02B3/14 , H10N30/2047
摘要： A glass membrane deformation assembly configured to deform a glass membrane includes: a deformable glass membrane having a first surface and a second surface; a piezoelectric layer affixed to a first surface of the deformable glass membrane, wherein the piezoelectric layer is controllably deformable via a voltage potential; a structural member affixed to at least a first portion of the second surface of the deformable glass membrane; and a deformable lens assembly affixed to at least a second portion of the second surface of the deformable glass membrane; wherein the controllably deformation of the piezoelectric layer is configured to controllably deform the deformable glass membrane and the deformable lens assembly.
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公开(公告)号：US11327276B2
公开(公告)日：2022-05-10
申请号：US16256495
申请日：2019-01-24
发明人： Guiqin Wang , Xiaolei Liu , Matthew Ng
摘要： A multi-axis MEMS assembly includes a micro-electrical-mechanical system (MEMS) actuator configured to provide linear three-axis movement. The micro-electrical-mechanical system (MEMS) actuator includes: an in-plane MEMS actuator, and an out-of-plane MEMS actuator. An optoelectronic device is coupled to the micro-electrical-mechanical system (MEMS) actuator. The out-of-plane MEMS actuator includes a multi-morph piezoelectric actuator.
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公开(公告)号：US12132420B2
公开(公告)日：2024-10-29
申请号：US16725825
申请日：2019-12-23
发明人： Xiaolei Liu , Guiqin Wang , Matthew Ng
IPC分类号： H02N1/00 , B81B3/00 , B81B7/00 , B81B7/02 , G02B7/02 , G02B7/09 , G02B27/64 , H02N2/02 , H04N23/68 , H10N30/20
CPC分类号： H02N1/008 , B81B3/0021 , B81B3/0062 , B81B7/0006 , B81B7/008 , B81B7/02 , G02B7/09 , G02B27/646 , H02N2/02 , H04N23/687 , H10N30/20 , H10N30/2044 , B81B2201/033 , B81B2201/034 , B81B2201/047 , B81B2203/0118 , B81B2203/0136 , B81B2203/05 , B81B2203/053
摘要： A package for moving a platform in six degrees of freedom, is provided. The platform may include an optoelectronic device mounted thereon. The package includes an in-plane actuator which may be a MEMS actuator and an out-of-plane actuator which may be formed of a piezoelectric element. The in-plane MEMS actuator may be mounted on the out-of-plane actuator mounted on a recess in a PCB. The in-plane MEMS actuator includes a plurality comb structures in which fingers of opposed combs overlap one another, i.e. extend past each other's ends. The out-of-plane actuator includes a central portion and a plurality of surrounding stages that are connected to the central portion. The in-plane MEMS actuator is coupled to the out-of-plane Z actuator to provide three degrees of freedom to the payload which may be an optoelectronic device included in the package.
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公开(公告)号：US11652425B2
公开(公告)日：2023-05-16
申请号：US16228047
申请日：2018-12-20
发明人： Guiqin Wang , Xiaolei Liu
摘要： A multi-axis MEMS assembly includes: a micro-electrical-mechanical system (MEMS) actuator configured to provide linear three-axis movement; and an optoelectronic device coupled to the micro-electrical-mechanical system (MEMS) actuator.
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公开(公告)号：US20230097412A1
公开(公告)日：2023-03-30
申请号：US17936699
申请日：2022-09-29
发明人： Matthew Ng , Xiaolei Liu , Guiqin Wang
IPC分类号： H02N1/00
摘要： A temporary MEMS-based locking assembly is configured to temporarily compress electrically conductive flexures and includes: a first locking structure coupled to a first portion of a MEMS conductive assembly; a second locking structure coupled to a second portion of the MEMS conductive assembly, wherein: the electrically conductive flexures are positioned between the first portion of the MEMS conductive assembly and the second portion of the MEMS conductive assembly, and the first and second locking structures are configured to engage each other upon the compression of the electrically conductive flexures to effectuate the locking of the first portion of the MEMS conductive assembly with respect to the second portion of the MEMS conductive assembly.
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公开(公告)号：US11825749B2
公开(公告)日：2023-11-21
申请号：US16679219
申请日：2019-11-10
发明人： Guiqin Wang , Xiaolei Liu , Mahmood Samiee , Yufeng Wang
IPC分类号： H01L41/09 , H10N30/20 , H10N30/04 , H10N30/06 , H10N30/076 , H10N30/077 , H10N30/082
CPC分类号： H10N30/2047 , H10N30/04 , H10N30/06 , H10N30/076 , H10N30/077 , H10N30/082
摘要： A method of generating a piezoelectric actuator includes: forming a piezoelectric member upon a rigid substrate; and removing one or more portions of the rigid substrate to form one or more gaps in the rigid substrate, thus defining at least one deformable portion of the piezoelectric member and at least one rigid portion of the piezoelectric member.
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公开(公告)号：US11522472B2
公开(公告)日：2022-12-06
申请号：US16584471
申请日：2019-09-26
发明人： Guiqin Wang , Xiaolei Liu
摘要： A multi-axis MEMS assembly includes: a micro-electrical-mechanical system (MEMS) actuator configured to provide linear three-axis movement, the micro-electrical-mechanical system (MEMS) actuator including: an in-plane MEMS actuator, and an out-of-plane MEMS actuator including a multi-morph piezoelectric actuator; an optoelectronic device coupled to the in-plane MEMS actuator; and a lens barrel assembly coupled to the out-of-plane MEMS actuator.
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公开(公告)号：US20240154543A1
公开(公告)日：2024-05-09
申请号：US18502438
申请日：2023-11-06
发明人： Matthew Ng , Guiqin Wang
IPC分类号： H02N1/00
CPC分类号： H02N1/008
摘要： An electrically-conductive, MEMS flexure assembly includes: a first MEMS subportion including a first plurality of electrically-conductive pads; a second MEMS subportion including a second plurality of electrically-conductive pads; and a plurality of MEMS electrically-conductive flexures electrically coupling the first plurality of electrically-conductive pads on the first MEMS subportion and the second plurality of electrically-conductive pads on the second MEMS subportion.
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公开(公告)号：US20230192474A1
公开(公告)日：2023-06-22
申请号：US18067447
申请日：2022-12-16
发明人： Matthew Ng , Guiqin Wang
CPC分类号： B81B3/0021 , H04N23/55 , H04N23/685 , B81B2203/0136 , B81B2203/0118 , B81B2201/033 , B81B2207/091
摘要： A spacer assembly includes: an essentially-planer structural portion configured to position an image sensor on a MEMS actuator; an outer sub-portion configured to be mounted to the MEMS actuator; and an inner sub-portion configured to mount the image sensor.
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