- 专利标题: Package with a highly conductive layer deposited on die using throughput additive deposition prior to TIM1 dispense
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申请号: US16639545申请日: 2017-09-30
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公开(公告)号: US11328978B2公开(公告)日: 2022-05-10
- 发明人: Feras Eid , Johanna M. Swan , Sergio Chan Arguedas , John J. Beatty
- 申请人: Intel Corporation
- 申请人地址: US CA Santa Clara
- 专利权人: Intel Corporation
- 当前专利权人: Intel Corporation
- 当前专利权人地址: US CA Santa Clara
- 代理机构: Schwabe, Williamson & Wyatt P.C.
- 国际申请: PCT/US2017/054676 WO 20170930
- 国际公布: WO2019/066992 WO 20190404
- 主分类号: H01L23/367
- IPC分类号: H01L23/367 ; H01L21/48 ; H01L49/02 ; H01L23/00 ; H01L23/10
摘要:
A device package and a method of forming a device package are described. The device package has dies disposed on a substrate, and one or more layers with a high thermal conductivity, referred to as the highly-conductive (HC) intermediate layers, disposed on the dies on the substrate. The device package further includes a lid with legs on an outer periphery of the lid, a top surface, and a bottom surface. The legs of the lid are attached to the substrate with a sealant. The bottom surface of the lid is disposed over the one or more HC intermediate layers and the one or more dies on the substrate. The device package may also include thermal interface materials (TIMs) disposed on the HC intermediate layers. The TIMs may be disposed between the bottom surface of the lid and one or more top surfaces of the HC intermediate layers.
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