Invention Grant
- Patent Title: Semiconductor device with fish bone structure and methods of forming the same
-
Application No.: US16945298Application Date: 2020-07-31
-
Publication No.: US11329168B2Publication Date: 2022-05-10
- Inventor: Chih-Chuan Yang , Kuo-Hsiu Hsu
- Applicant: Taiwan Semiconductor Manufacturing Co., Ltd.
- Applicant Address: TW Hsin-Chu
- Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
- Current Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
- Current Assignee Address: TW Hsin-Chu
- Agency: Haynes and Boone, LLP
- Main IPC: H01L21/02
- IPC: H01L21/02 ; H01L21/28 ; H01L21/8238 ; H01L27/092 ; H01L27/11 ; H01L29/06 ; H01L29/417 ; H01L29/423 ; H01L29/49 ; H01L29/66 ; H01L29/786

Abstract:
Semiconductor device and the manufacturing method thereof are disclosed. An exemplary semiconductor device comprises a first semiconductor stack and a second semiconductor stack over a substrate, wherein each of the first and second semiconductor stacks includes semiconductor layers stacked up and separated from each other; a dummy spacer between the first and second semiconductor stacks, wherein the dummy spacer contacts a first sidewall of each semiconductor layer of the first and second semiconductor stacks; and a gate structure wrapping a second sidewall, a top surface, and a bottom surface of each semiconductor layer of the first and second semiconductor stacks.
Public/Granted literature
- US20220037535A1 SEMICONDUCTOR DEVICE WITH FISH BONE STRUCTURE AND METHODS OF FORMING THE SAME Public/Granted day:2022-02-03
Information query
IPC分类: