Invention Grant
- Patent Title: Plasma processing apparatus
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Application No.: US16918728Application Date: 2020-07-01
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Publication No.: US11335542B2Publication Date: 2022-05-17
- Inventor: Tetsuya Saitou
- Applicant: Tokyo Electron Limited
- Applicant Address: JP Tokyo
- Assignee: Tokyo Electron Limited
- Current Assignee: Tokyo Electron Limited
- Current Assignee Address: JP Tokyo
- Agency: Nath, Goldberg & Meyer
- Agent Jerald L. Meyer; Tanya E. Harkins
- Priority: JPJP2019-126710 20190708
- Main IPC: H01J37/32
- IPC: H01J37/32 ; H05H1/46

Abstract:
A plasma processing apparatus includes: a processing container; a stage provided in the processing container and configured to place a substrate on the stage; a gas introduction part provided in an upper portion of the processing container to face the stage and configured to introduce a processing gas into the processing container; and an annular exhaust path which is provided in an upper portion of a side wall of the processing container, and in which an opening toward a center of the processing container is formed at an inner circumferential side of the exhaust path, wherein the stage and the gas introduction part are respectively connected to high-frequency power supplies for generating plasma of the processing gas, wherein the exhaust path is grounded, wherein the plasma processing apparatus further comprises a grounded plasma distribution adjuster covering the opening, and wherein through-holes are formed in the plasma distribution adjuster.
Public/Granted literature
- US20210013004A1 PLASMA PROCESSING APPARATUS Public/Granted day:2021-01-14
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