Invention Grant
- Patent Title: Hybrid structure for a surface acoustic wave device
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Application No.: US16072587Application Date: 2017-01-17
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Publication No.: US11335847B2Publication Date: 2022-05-17
- Inventor: Oleg Kononchuk , Eric Butaud , Eric Desbonnets
- Applicant: Soitec
- Applicant Address: FR Bernin
- Assignee: Soitec
- Current Assignee: Soitec
- Current Assignee Address: FR Bernin
- Agency: TraskBritt
- Priority: FR1650774 20160201
- International Application: PCT/FR2017/050092 WO 20170117
- International Announcement: WO2017/134357 WO 20170810
- Main IPC: H01L41/312
- IPC: H01L41/312 ; H01L41/08 ; H03H9/02 ; H03H9/00 ; H03H3/02

Abstract:
The disclosure relates to a hybrid structure for a surface-acoustic-wave device comprising a useful layer of piezoelectric material joined to a carrier substrate having a thermal expansion coefficient lower than that of the useful layer; the hybrid structure comprising an intermediate layer located between the useful layer and the carrier substrate, the intermediate layer being a structured layer formed from at least two different materials comprising a plurality of periodic motifs in the plane of the intermediate layer.
Public/Granted literature
- US20190036007A1 HYBRID STRUCTURE FOR A SURFACE ACOUSTIC WAVE DEVICE Public/Granted day:2019-01-31
Information query
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