Invention Grant
- Patent Title: Semiconductor package and method of fabricating the same
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Application No.: US17130505Application Date: 2020-12-22
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Publication No.: US11348876B2Publication Date: 2022-05-31
- Inventor: Kyoung Lim Suk , Seung-Kwan Ryu , Seokhyun Lee
- Applicant: SAMSUNG ELECTRONICS CO., LTD.
- Applicant Address: KR Suwon-si
- Assignee: SAMSUNG ELECTRONICS CO., LTD.
- Current Assignee: SAMSUNG ELECTRONICS CO., LTD.
- Current Assignee Address: KR Suwon-si
- Agency: F. Chau & Associates, LLC
- Priority: KR10-2018-0056054 20180516
- Main IPC: H01L21/00
- IPC: H01L21/00 ; H01L23/538 ; H01L21/48 ; H01L21/56 ; H01L23/31 ; H01L23/00 ; H01L25/10 ; H01L25/00 ; H01L21/683 ; H01L23/498

Abstract:
A method of fabricating a semiconductor package includes forming a capping pattern on a chip pad of a semiconductor device. The semiconductor device includes a passivation pattern that exposes a portion of the chip pad, and the capping pattern covers the chip pad. The method further includes forming a redistribution layer on the capping pattern. Forming the redistribution layer includes forming a first insulation pattern on the capping pattern and the passivation pattern, forming a first opening in the first insulation pattern by performing exposure and development processes on the first insulation pattern, in which the first opening exposes a portion of the capping pattern, and forming a redistribution pattern in the first opening.
Public/Granted literature
- US20210111128A1 SEMICONDUCTOR PACKAGE AND METHOD OF FABRICATING THE SAME Public/Granted day:2021-04-15
Information query
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