Invention Grant
- Patent Title: Digital x-ray detector and thin-film transistor array substrate for the same
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Application No.: US16666265Application Date: 2019-10-28
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Publication No.: US11348963B2Publication Date: 2022-05-31
- Inventor: Jungjune Kim , Youngjin Yi , Younghun Han , Youngyoung Chang
- Applicant: LG Display Co., Ltd.
- Applicant Address: KR Seoul
- Assignee: LG Display Co., Ltd.
- Current Assignee: LG Display Co., Ltd.
- Current Assignee Address: KR Seoul
- Agency: Seed IP Law Group LLP
- Priority: KR10-2018-0132421 20181031
- Main IPC: G01T1/24
- IPC: G01T1/24 ; H01L27/146 ; G01T1/20

Abstract:
The present disclosure relates to a digital X-ray detector and a thin-film transistor array substrate for the same. Disclosed is a thin-film transistor array substrate for a digital X-ray detector in which deterioration of electrical characteristics of a thin-film transistors made of an oxide semiconductor may be reduced or minimized and aging of a PIN diode caused by external moisture may be reduced or minimized. Further, disclosed is a digital X-ray detector including the array substrate. To this end, the array substrate includes a second protective layer having a variety of patterns so as to cover at least a portion of the PIN diode but not to cover the thin-film transistor. The second protective layer includes SiNx. Thus, a de-hydrogenation path from the thin-film transistor may be secured and an external moisture barrier effect for the PIN diode may be achieved.
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