- 专利标题： Nozzle having real time inspection functions
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申请号： US16709378申请日： 2019-12-10
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公开(公告)号： US11355370B2公开(公告)日： 2022-06-07
- 发明人: Kai-Lin Chuang , Tsung-Chi Chen , Pei-Jung Chang , Chun-Wei Huang , Jun Xiu Liu
- 申请人： TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY LTD.
- 申请人地址： TW Hsinchu
- 专利权人： TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY LTD.
- 当前专利权人： TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY LTD.
- 当前专利权人地址： TW Hsinchu
- 代理机构： WPAT, P.C., Intellectual Property Attorneys
- 代理商 Anthony King
- 主分类号： H01L21/67
- IPC分类号： H01L21/67 ; H01L21/66 ; B05B12/08
摘要：
A method of monitoring a fluid includes: applying the fluid from within a nozzle to a surface of a wafer outside of the nozzle; emitting light, by a light source, from the nozzle to the surface; receiving light reflected from the surface by a light sensor and causing the reflected light to propagate into the nozzle; and determining whether a variation of the fluid occurs according to the reflected light.
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