Invention Grant
- Patent Title: Methods for producing 3D semiconductor memory device and structure utilizing alignment marks
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Application No.: US17473224Application Date: 2021-09-13
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Publication No.: US11355380B2Publication Date: 2022-06-07
- Inventor: Zvi Or-Bach , Brian Cronquist , Deepak C. Sekar
- Applicant: Monolithic 3D Inc.
- Applicant Address: US OR Klamath Falls
- Assignee: Monolithic 3D Inc.
- Current Assignee: Monolithic 3D Inc.
- Current Assignee Address: US OR Klamath Falls
- Agency: Patent PC
- Agent Bao Tran
- Main IPC: H01L21/683
- IPC: H01L21/683 ; H01L21/74 ; H01L21/762 ; H01L21/768 ; H01L21/822 ; H01L21/8238 ; H01L21/84 ; H01L23/48 ; H01L23/525 ; H01L27/02 ; H01L27/06 ; H01L27/092 ; H01L27/10 ; H01L27/105 ; H01L27/108 ; H01L27/11 ; H01L27/112 ; H01L27/11526 ; H01L27/11529 ; H01L27/11551 ; H01L27/11573 ; H01L27/11578 ; H01L27/118 ; H01L27/12 ; H01L29/423 ; H01L29/66 ; H01L29/78 ; H01L29/788 ; H01L29/792 ; G11C8/16 ; H01L23/367 ; H01L25/065 ; H01L25/00 ; H01L23/00

Abstract:
A method for producing a 3D memory device, the method including: providing a first level including a first single crystal layer; forming first alignment marks and control circuits in and on the first level, where the control circuits include first single crystal transistors, where the control circuits include at least two metal layers; forming at least one second level disposed on top of the first level; performing a first etch step within the second level; forming at least one third level disposed on top of the at least one second level; performing a second etch step within the third level; and performing additional processing steps to form a plurality of first memory cells within the second level and a plurality of second memory cells within the third level, where the first memory cells include second transistors, and where the second memory cells include third transistors.
Public/Granted literature
- US20210407842A1 METHOD FOR PRODUCING A 3D SEMICONDUCTOR MEMORY DEVICE AND STRUCTURE Public/Granted day:2021-12-30
Information query
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