- Patent Title: Microelectromechanical infrared sensing apparatus having stoppers
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Application No.: US16904820Application Date: 2020-06-18
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Publication No.: US11359970B2Publication Date: 2022-06-14
- Inventor: Bor-Shiun Lee , Ming-Fa Chen , Ying-Che Lo , Chao-Ta Huang
- Applicant: Industrial Technology Research Institute
- Applicant Address: TW Hsin-Chu
- Assignee: Industrial Technology Research Institute
- Current Assignee: Industrial Technology Research Institute
- Current Assignee Address: TW Hsin-Chu
- Agency: WPAT, PC
- Priority: TW108147466 20191224
- Main IPC: G01J5/02
- IPC: G01J5/02 ; G01J5/20 ; H01L31/09

Abstract:
A microelectromechanical infrared sensing apparatus includes a substrate, a sensing plate, a plurality of supporting elements and a plurality of stoppers. The substrate includes an infrared reflecting layer. The sensing plate includes an infrared absorbing layer. The supporting elements are disposed on the substrate, and each of the supporting elements is connected to the sensing plate, such that the sensing plate is suspended above the infrared reflecting layer. The stoppers are disposed between the substrate and the sensing plate. When the sensing plate moves toward the infrared reflecting layer and the stoppers contact both the substrate and the sensing plate, the distance between the sensing plate and the infrared reflecting layer is substantially equal to the height of at least one of the stoppers.
Public/Granted literature
- US20210190595A1 MICROELECTROMECHANICAL INFRARED SENSING APPARATUS HAVING STOPPERS Public/Granted day:2021-06-24
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