Invention Grant
- Patent Title: Selecting a coreset of potential defects for estimating expected defects of interest
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Application No.: US16782005Application Date: 2020-02-04
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Publication No.: US11360030B2Publication Date: 2022-06-14
- Inventor: Yotam Sofer , Shaul Engler , Boaz Cohen , Saar Shabtay , Amir Bar , Marcelo Gabriel Bacher
- Applicant: Applied Materials Israel Ltd.
- Applicant Address: IL Rehovot
- Assignee: Applied Materials Israel Ltd.
- Current Assignee: Applied Materials Israel Ltd.
- Current Assignee Address: IL Rehovot
- Agency: Lowenstein Sandler LLP
- Main IPC: G01N21/88
- IPC: G01N21/88 ; G06F30/27 ; G06K9/62

Abstract:
Disclosed is a system, method and computer readable medium for selecting a coreset of potential defects for estimating expected defects of interest. An example method includes obtaining a plurality of defects of interest (DOIs) and false alarms (FAs) from a review subset selected from a group of potential defects received from an inspection tool. The method further includes generating a representative subset of the group of potential defects. The representative subset includes potential defects selected in accordance with a distribution of the group of potential defects within an attribute space. The method further includes, upon training a classifier using data informative of the attribute values of the DOIs, the potential defects of the representative subset, and respective indications thereof as DOIs or FAs, applying the classifier to at least some of the potential defects to obtain an estimation of a number of expected DOIs in the specimen.
Public/Granted literature
- US20210239623A1 METHOD OF EXAMINING SPECIMENS AND SYSTEM THEREOF Public/Granted day:2021-08-05
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