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公开(公告)号：US11940390B2
公开(公告)日：2024-03-26
申请号：US17829593
申请日：2022-06-01
发明人： Yotam Sofer , Shaul Engler , Boaz Cohen , Saar Shabtay , Amir Bar , Marcelo Gabriel Bacher
CPC分类号： G01N21/8851 , G06F18/00 , G06F30/27 , G06V10/70 , G06V10/993 , G06V20/69 , G01N2021/8854
摘要： A system, method and computer readable medium for examining a specimen, the method comprising: obtaining defects of interest (DOIs) and false alarms (FAs) from a review subset selected from a group of potential defects received from an inspection tool, each potential defect is associated with attribute values defining a location of the potential defect in an attribute space; generating a representative subset of the group, comprising potential defects selected in accordance with a distribution of the potential defects within the attribute space, and indicating the potential defects in the representative subset as FA; and training a classifier using data informative of the attribute values of the DOIs, the potential defects of the representative subset, and respective indications thereof as DOIs or FAs, wherein the trained classifier is to be applied to at least some of the potential defects to obtain an estimation of a number of expected DOIs.
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公开(公告)号：US20220291138A1
公开(公告)日：2022-09-15
申请号：US17829593
申请日：2022-06-01
发明人： Yotam Sofer , Shaul Engler , Boaz Cohen , Saar Shabtay , Amir Bar , Marcelo Gabriel Bacher
摘要： A system, method and computer readable medium for examining a specimen, the method comprising: obtaining defects of interest (DOIs) and false alarms (FAs) from a review subset selected from a group of potential defects received from an inspection tool, each potential defect is associated with attribute values defining a location of the potential defect in an attribute space; generating a representative subset of the group, comprising potential defects selected in accordance with a distribution of the potential defects within the attribute space, and indicating the potential defects in the representative subset as FA; and training a classifier using data informative of the attribute values of the DOIs, the potential defects of the representative subset, and respective indications thereof as DOIs or FAs, wherein the trained classifier is to be applied to at least some of the potential defects to obtain an estimation of a number of expected DOIs.
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公开(公告)号：US11360030B2
公开(公告)日：2022-06-14
申请号：US16782005
申请日：2020-02-04
发明人： Yotam Sofer , Shaul Engler , Boaz Cohen , Saar Shabtay , Amir Bar , Marcelo Gabriel Bacher
摘要： Disclosed is a system, method and computer readable medium for selecting a coreset of potential defects for estimating expected defects of interest. An example method includes obtaining a plurality of defects of interest (DOIs) and false alarms (FAs) from a review subset selected from a group of potential defects received from an inspection tool. The method further includes generating a representative subset of the group of potential defects. The representative subset includes potential defects selected in accordance with a distribution of the group of potential defects within an attribute space. The method further includes, upon training a classifier using data informative of the attribute values of the DOIs, the potential defects of the representative subset, and respective indications thereof as DOIs or FAs, applying the classifier to at least some of the potential defects to obtain an estimation of a number of expected DOIs in the specimen.
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