- 专利标题： Photonic devices and methods of fabrication thereof
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申请号： US17083525申请日： 2020-10-29
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公开(公告)号： US11378827B2公开(公告)日： 2022-07-05
- 发明人: Stephane Monfray , Frédéric Boeuf
- 申请人： STMicroelectronics (Crolles 2) SAS
- 申请人地址： FR Crolles
- 专利权人： STMicroelectronics (Crolles 2) SAS
- 当前专利权人： STMicroelectronics (Crolles 2) SAS
- 当前专利权人地址： FR Crolles
- 代理机构： Slater Matsil, LLP
- 优先权： FR1851612 20180223
- 主分类号： G02F1/035
- IPC分类号： G02F1/035 ; G02F1/025 ; H01L29/66
摘要：
A photonic device includes a first region having a first doping type, and a second region having a second doping type, where the first region and the second region contact to form a vertical PN junction. The first region includes a silicon germanium (SiGe) region having a gradual germanium concentration.
公开/授权文献
- US20210041727A1 PHOTONIC DEVICES AND METHODS OF FABRICATION THEREOF 公开/授权日：2021-02-11
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