Invention Grant
- Patent Title: Method for conditioning a ceramic coating
-
Application No.: US17255635Application Date: 2019-07-01
-
Publication No.: US11384430B2Publication Date: 2022-07-12
- Inventor: Hong Shih , Xiaomin Bin , Duane Outka , Eric A. Pape , Gregory A. Pilgrim , Girish M. Hundi , Cliff La Croix
- Applicant: Lam Research Corporation
- Applicant Address: US CA Fremont
- Assignee: Lam Research Corporation
- Current Assignee: Lam Research Corporation
- Current Assignee Address: US CA Fremont
- Agency: Beyer Law Group LLP
- International Application: PCT/US2019/040126 WO 20190701
- International Announcement: WO2020/009990 WO 20200109
- Main IPC: C23C16/44
- IPC: C23C16/44 ; H01J37/32
Abstract:
A method for conditioning ceramic coating on a part for use in a plasma processing chamber is provided. The ceramic coating is wetted with a solution, wherein the solution is formed by mixing a solvent with an electrolyte, wherein from 1% to 10% of the electrolyte dissociates in the solution. The ceramic coating is blasted with particles. The ceramic coating is rinsed.
Public/Granted literature
- US20210280393A1 METHOD FOR CONDITIONING A CERAMIC COATING Public/Granted day:2021-09-09
Information query
IPC分类:
