Invention Grant
- Patent Title: Plasma processing method and plasma processing apparatus
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Application No.: US17102444Application Date: 2020-11-24
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Publication No.: US11387077B2Publication Date: 2022-07-12
- Inventor: Shinji Kubota , Kazuya Nagaseki , Shinji Himori , Koichi Nagami
- Applicant: Tokyo Electron Limited
- Applicant Address: JP Tokyo
- Assignee: Tokyo Electron Limited
- Current Assignee: Tokyo Electron Limited
- Current Assignee Address: JP Tokyo
- Agency: Xsensus LLP
- Priority: JPJP2019-213040 20191126
- Main IPC: H01J37/32
- IPC: H01J37/32

Abstract:
A disclosed plasma processing method includes generating plasma in a chamber of a plasma processing apparatus by supplying radio frequency power from a radio frequency power source in a first period. The plasma processing method further includes stopping supply of the radio frequency power from the radio frequency power source in a second period following the first period. The plasma processing method further includes applying a negative direct-current voltage from a bias power source to a substrate support in a third period following the second period. In the third period, the radio frequency power is not supplied. In the third period, the negative direct-current voltage is set to generate ions in a chamber by secondary electrons that are emitted by causing ions in the chamber to collide with a substrate.
Public/Granted literature
- US20210159049A1 PLASMA PROCESSING METHOD AND PLASMA PROCESSING APPARATUS Public/Granted day:2021-05-27
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