Invention Grant
- Patent Title: Composition for metal electroplating comprising leveling agent
-
Application No.: US16638318Application Date: 2018-08-31
-
Publication No.: US11387108B2Publication Date: 2022-07-12
- Inventor: Marcel Patrik Kienle , Cornelia Roeger-Goepfert , Dieter Mayer , Marco Arnold , Alexander Fluegel , Charlotte Emnet
- Applicant: BASF SE
- Applicant Address: DE Ludwigshafen am Rhein
- Assignee: BASF SE
- Current Assignee: BASF SE
- Current Assignee Address: DE Ludwigshafen am Rhein
- Agency: Armstrong Teasdale LLP
- Priority: EP17189140 20170904
- International Application: PCT/EP2018/073450 WO 20180831
- International Announcement: WO2019/043146 WO 20190307
- Main IPC: H01L21/288
- IPC: H01L21/288 ; C25D3/38 ; C25D5/02 ; C25D7/12
Abstract:
A composition for metal plating comprising a source of metal ions and at least one leveling agent comprising at least one polyaminoamide comprising a polymer fragment of formula (I) or derivatives thereof obtainable by complete or partial protonation or N-quarternisation.
Public/Granted literature
- US20200185224A1 COMPOSITION FOR METAL ELECTROPLATING COMPRISING LEVELING AGENT Public/Granted day:2020-06-11
Information query
IPC分类:
