Invention Grant
- Patent Title: Metal-organic pulsed laser deposition for stoichiometric complex oxide thin films
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Application No.: US16985455Application Date: 2020-08-05
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Publication No.: US11437234B2Publication Date: 2022-09-06
- Inventor: Chang-Beom Eom , Jungwoo Lee
- Applicant: Wisconsin Alumni Research Foundation
- Applicant Address: US WI Madison
- Assignee: Wisconsin Alumni Research Foundation
- Current Assignee: Wisconsin Alumni Research Foundation
- Current Assignee Address: US WI Madison
- Agency: Bell & Manning, LLC
- Main IPC: H01L21/02
- IPC: H01L21/02 ; H01L29/24 ; C23C14/08 ; C23C14/28 ; H01L29/778
Abstract:
Methods and systems for forming complex oxide films are provided. Also provided are complex oxide films and heterostructures made using the methods and electronic devices incorporating the complex oxide films and heterostructures. In the methods pulsed laser deposition is conducted in an atmosphere containing a metal-organic precursor to form highly stoichiometric complex oxides.
Information query
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