Invention Grant
- Patent Title: Perovskite oxides with a-axis orientation
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Application No.: US16712732Application Date: 2019-12-12
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Publication No.: US11442297B2Publication Date: 2022-09-13
- Inventor: Clement Merckling
- Applicant: IMEC VZW
- Applicant Address: BE Leuven
- Assignee: IMEC VZW
- Current Assignee: IMEC VZW
- Current Assignee Address: BE Leuven
- Agency: McDonnell Boehnen Hulbert & Berghoff LLP
- Priority: EP18214708 20181220
- Main IPC: G02F1/03
- IPC: G02F1/03 ; C23C14/08 ; C23C14/28 ; C30B23/02 ; C30B29/32

Abstract:
A structure is provided and includes (i) a substrate having a surface, the surface comprising a ternary or quaternary oxide having a first lattice parameter, the first lattice parameter being a lattice parameter of the ternary or quaternary oxide as it is present at the surface; and (ii) a layer of a perovskite oxide on the ternary or quaternary oxide, the perovskite oxide having a second lattice parameter, the second lattice parameter being a native lattice parameter of the perovskite oxide, wherein the first lattice parameter is larger than the second lattice parameter. A method for forming a perovskite oxide with an a-axis orientation is also provided.
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