- 专利标题: Self-aligned encapsulation hard mask to separate physically under-etched MTJ cells to reduce conductive R-deposition
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申请号: US17121457申请日: 2020-12-14
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公开(公告)号: US11444241B2公开(公告)日: 2022-09-13
- 发明人: Yi Yang , Dongna Shen , Vignesh Sundar , Yu-Jen Wang
- 申请人: Taiwan Semiconductor Manufacturing Company, Ltd.
- 申请人地址: TW Hsinchu
- 专利权人: Taiwan Semiconductor Manufacturing Company, Ltd.
- 当前专利权人: Taiwan Semiconductor Manufacturing Company, Ltd.
- 当前专利权人地址: TW Hsinchu
- 代理机构: Haynes and Boone, LLP
- 主分类号: H01L43/12
- IPC分类号: H01L43/12 ; H01L43/02 ; H01F41/34 ; H01F10/32 ; G11C11/16 ; H01L27/22
摘要:
A method for etching a magnetic tunneling junction (MTJ) structure is described. A MTJ stack is deposited on a bottom electrode wherein the MTJ stack comprises at least a pinned layer, a barrier layer on the pinned layer, and a free layer on the barrier layer, A top electrode layer is deposited on the MTJ stack. A hard mask is deposited on the top electrode layer. The top electrode layer and hard mask are etched. Thereafter, the MTJ stack not covered by the hard mask is etched, stopping at or within the pinned layer. Thereafter, an encapsulation layer is deposited over the partially etched MTJ stack and etched away on horizontal surfaces leaving a self-aligned hard mask on sidewalls of the partially etched MTJ stack. Finally, the remaining MTJ stack not covered by hard mask and self-aligned hard mask is etched to complete the MTJ structure.
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