Invention Grant
- Patent Title: Target formation apparatus
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Application No.: US17273978Application Date: 2019-09-20
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Publication No.: US11448967B2Publication Date: 2022-09-20
- Inventor: Georgiy Olegovich Vaschenko
- Applicant: ASML Netherlands B.V.
- Applicant Address: NL Veldhoven
- Assignee: ASML Netherlands B.V.
- Current Assignee: ASML Netherlands B.V.
- Current Assignee Address: NL Veldhoven
- Agency: DiBerardino McGovern IP Group LLC
- International Application: PCT/US2019/052285 WO 20190920
- International Announcement: WO2020/068598 WO 20200402
- Main IPC: G03F7/20
- IPC: G03F7/20 ; C23C4/123 ; H05G2/00

Abstract:
A system for an extreme ultraviolet light source includes a capillary tube, the capillary tube including a sidewall extending from a first end to a second end, the sidewall including an exterior wall and an interior wall, the interior wall defining a passage that extends from the first end to the second end; an actuator configured to be positioned at the exterior wall of the capillary tube; and an adhesive between the exterior wall and the actuator, the adhesive being configured to mechanically couple the actuator and the capillary tube, wherein the adhesive occupies a volume that remains substantially the same or expands as a result of curing.
Public/Granted literature
- US20210311398A1 TARGET FORMATION APPARATUS Public/Granted day:2021-10-07
Information query
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