Invention Grant
- Patent Title: Single diffusion cut for gate structures
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Application No.: US16367733Application Date: 2019-03-28
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Publication No.: US11450570B2Publication Date: 2022-09-20
- Inventor: Hui Zang , Ruilong Xie
- Applicant: GLOBALFOUNDRIES U.S. INC.
- Applicant Address: US CA Santa Clara
- Assignee: GLOBALFOUNDRIES U.S. INC.
- Current Assignee: GLOBALFOUNDRIES U.S. INC.
- Current Assignee Address: US CA Santa Clara
- Agency: Roberts Calderon Safran & Cole, P.C.
- Agent Francois Pagette; Andrew M. Calderon
- Main IPC: H01L21/8238
- IPC: H01L21/8238 ; H01L21/8234 ; H01L29/66 ; H01L21/768 ; H01L27/088 ; H01L29/78

Abstract:
The present disclosure relates to semiconductor structures and, more particularly, to a single diffusion cut for gate structures and methods of manufacture. The structure includes: a plurality of fin structures; a plurality of gate structures extending over the plurality of fin structures; a plurality of diffusion regions adjacent to the each of the plurality of gate structures; a single diffusion break between the diffusion regions of the adjacent gate structures; and a liner separating the single diffusion break from the diffusion regions.
Public/Granted literature
- US20200312718A1 SINGLE DIFFUSION CUT FOR GATE STRUCTURES Public/Granted day:2020-10-01
Information query
IPC分类: