- 专利标题: Fabricating correlated electron material (CEM) devices
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申请号: US16937403申请日: 2020-07-23
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公开(公告)号: US11450804B2公开(公告)日: 2022-09-20
- 发明人: Carlos Alberto Paz de Araujo , Jolanta Bozena Celinska , Lucian Shifren
- 申请人: Cerfe Labs, Inc.
- 申请人地址: US TX Austin
- 专利权人: Cerfe Labs, Inc.
- 当前专利权人: Cerfe Labs, Inc.
- 当前专利权人地址: US TX Austin
- 代理机构: Berkeley Law & Technology Group, LLP
- 主分类号: H01L45/00
- IPC分类号: H01L45/00 ; C23C16/40 ; C23C16/18 ; C23C16/455
摘要:
Subject matter disclosed herein may relate to construction of a correlated electron material (CEM) device. In particular embodiments, after formation of a film comprising layers of a transition metal oxide (TMO) material and a dopant, at least a portion of the film may be exposed to an elevated temperature. Exposure of the at least a portion of the film to the elevated temperature may continue until the atomic concentration of the dopant within the film is reduced, which may enable operation of the film as a correlated electron material CEM exhibiting switching of impedance states.
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