Invention Grant
- Patent Title: Retaining ring having inner surfaces with features
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Application No.: US16708287Application Date: 2019-12-09
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Publication No.: US11453099B2Publication Date: 2022-09-27
- Inventor: Steven Mark Reedy , Simon Yavelberg , Jeonghoon Oh , Steven M. Zuniga , Andrew J. Nagengast , Samuel Chu-Chiang Hsu , Gautam Shashank Dandavate
- Applicant: Applied Materials, Inc.
- Applicant Address: US CA Santa Clara
- Assignee: Applied Materials, Inc.
- Current Assignee: Applied Materials, Inc.
- Current Assignee Address: US CA Santa Clara
- Agency: Fish & Richardson P.C.
- Main IPC: B24B37/32
- IPC: B24B37/32 ; H01L21/687
Abstract:
Some implementations of a retaining ring has an inner surface having a first portion formed of multiple planar facets and a second portion that adjoins the first portion along a boundary and includes a frustoconical surface that is sloped downwardly from outside in. Some implementations of the retaining ring have a crenellated or serpentine inner surface, and/or an inner surface with alternating region of different surface properties or different tilt angles.
Information query
