公开(公告)号：US20240316723A1

公开(公告)日：2024-09-26

申请号：US18736281

申请日：2024-06-06

Applicant: Applied Materials, Inc.

Inventor： Steven Mark Reedy ,  Simon Yavelberg ,  Jeonghoon Oh ,  Steven M. Zuniga ,  Andrew J. Nagengast ,  Samuel Chu-Chiang Hsu ,  Gautam Shashank Dandavate

IPC: B24B37/32 ,  H01L21/687

CPC classification number: B24B37/32 ,  H01L21/68721

Abstract: Some implementations of a retaining ring has an inner surface having a first portion formed of multiple planar facets and a second portion that adjoins the first portion along a boundary and includes a frustoconical surface that is sloped downwardly from outside in. Some implementations of the retaining ring have a crenellated or serpentine inner surface, and/or an inner surface with alternating region of different surface properties or different tilt angles.

公开(公告)号：US12048981B2

公开(公告)日：2024-07-30

申请号：US17945932

申请日：2022-09-15

Applicant: Applied Materials, Inc.

Inventor： Steven Mark Reedy ,  Simon Yavelberg ,  Jeonghoon Oh ,  Steven M. Zuniga ,  Andrew J. Nagengast ,  Samuel Chu-Chiang Hsu ,  Gautam Shashank Dandavate

IPC: B24B37/32 ,  H01L21/687

CPC classification number: B24B37/32 ,  H01L21/68721

Abstract: Some implementations of a retaining ring has an inner surface having a first portion formed of multiple planar facets and a second portion that adjoins the first portion along a boundary and includes a frustoconical surface that is sloped downwardly from outside in. Some implementations of the retaining ring have a crenellated or serpentine inner surface, and/or an inner surface with alternating region of different surface properties or different tilt angles.

公开(公告)号：US20230019815A1

公开(公告)日：2023-01-19

申请号：US17945932

申请日：2022-09-15

Applicant: Applied Materials, Inc.

Inventor： Steven Mark Reedy ,  Simon Yavelberg ,  Jeonghoon Oh ,  Steven M. Zuniga ,  Andrew J. Nagengast ,  Samuel Chu-Chiang Hsu ,  Gautam Shashank Dandavate

IPC: B24B37/32 ,  H01L21/687

Abstract: Some implementations of a retaining ring has an inner surface having a first portion formed of multiple planar facets and a second portion that adjoins the first portion along a boundary and includes a frustoconical surface that is sloped downwardly from outside in. Some implementations of the retaining ring have a crenellated or serpentine inner surface, and/or an inner surface with alternating region of different surface properties or different tilt angles.

公开(公告)号：US11453099B2

公开(公告)日：2022-09-27

申请号：US16708287

申请日：2019-12-09

Applicant: Applied Materials, Inc.

Inventor： Steven Mark Reedy ,  Simon Yavelberg ,  Jeonghoon Oh ,  Steven M. Zuniga ,  Andrew J. Nagengast ,  Samuel Chu-Chiang Hsu ,  Gautam Shashank Dandavate

IPC: B24B37/32 ,  H01L21/687

Abstract: Some implementations of a retaining ring has an inner surface having a first portion formed of multiple planar facets and a second portion that adjoins the first portion along a boundary and includes a frustoconical surface that is sloped downwardly from outside in. Some implementations of the retaining ring have a crenellated or serpentine inner surface, and/or an inner surface with alternating region of different surface properties or different tilt angles.

公开(公告)号：US20160346897A1

公开(公告)日：2016-12-01

申请号：US14992763

申请日：2016-01-11

Applicant: Applied Materials, Inc.

Inventor： Steven Mark Reedy ,  Simon Yavelberg ,  Jeonghoon Oh ,  Steven M. Zuniga ,  Andrew J. Nagengast ,  Samuel Chu-Chiang Hsu ,  Gautam Shashank Dandavate

IPC: B24B37/32 ,  H01L21/306

CPC classification number: B24B37/32 ,  H01L21/68721

Abstract: Some implementations of a retaining ring has an inner surface having a first portion formed of multiple planar facets and a second portion that adjoins the first portion along a boundary and includes a frustoconical surface that is sloped downwardly from outside in. Some implementations of the retaining ring have a crenellated or serpentine inner surface, and/or an inner surface with alternating region of different surface properties or different tilt angles.

Abstract translation: 保持环的一些实施方式具有内表面，该内表面具有由多个平面小面形成的第一部分和沿着边界邻接第一部分的第二部分，并且包括从外部向下倾斜的截头圆锥形表面。保持环的一些实施方式 具有锯齿状或蛇形内表面，和/或具有不同表面性质或不同倾斜角的交替区域的内表面。