Invention Grant

3D microscopy
Abstract:
A microscopy method for three-dimensionally imaging an object, including imaging the object along a beam path into a first image on a first image plane. A first microlens array is arranged on the first image plane, and a second microlens array with the same pitch is arranged downstream of the first array. The two arrays laterally segment the first image and image same into a second image in which the segments are spaced apart and separated by gaps. On a pupil plane downstream of the microlens array, a provided phase mask generates a spot for each segment of the second image according to a pixel diffusion function. A detector detects the shape and structure of the spot, and a controller ascertains a lateral intensity distribution and depth specification from the shape and/or structure of the spot for each segment and generates a depth-resolved image of the object therefrom.
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