Invention Grant
- Patent Title: Plasma processing method and plasma processing apparatus
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Application No.: US16522890Application Date: 2019-07-26
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Publication No.: US11459655B2Publication Date: 2022-10-04
- Inventor: Michiko Nakaya , Toru Hisamatsu , Shinya Ishikawa , Sho Kumakura , Masanobu Honda , Yoshihide Kihara
- Applicant: TOKYO ELECTRON LIMITED
- Applicant Address: JP Tokyo
- Assignee: TOKYO ELECTRON LIMITED
- Current Assignee: TOKYO ELECTRON LIMITED
- Current Assignee Address: JP Tokyo
- Agency: Weihrouch IP
- Priority: JPJP2018-140334 20180726,JPJP2019-104041 20190603
- Main IPC: C23C16/455
- IPC: C23C16/455 ; H01J37/32 ; H01L21/02 ; H01L21/311 ; C23C16/52

Abstract:
A plasma processing method executed by a plasma processing apparatus in the present disclosure includes a first step and a second step. In the first step, the plasma processing apparatus forms a first film on the side walls of an opening in the processing target, the first film having different thicknesses along a spacing between pairs of side walls facing each other. In the second step, the plasma processing apparatus forms a second film by performing a film forming cycle once or more times after the first step, the second film having different thicknesses along the spacing between the pairs of side walls facing each other.
Public/Granted literature
- US20200032395A1 PLASMA PROCESSING METHOD AND PLASMA PROCESSING APPARATUS Public/Granted day:2020-01-30
Information query
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