Invention Grant
- Patent Title: Composition for film formation, film-forming method and directed self-assembly lithography process
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Application No.: US16239592Application Date: 2019-01-04
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Publication No.: US11460767B2Publication Date: 2022-10-04
- Inventor: Hiroyuki Komatsu , Tomohiro Oda , Hitoshi Osaki , Masafumi Hori , Takehiko Naruoka
- Applicant: JSR CORPORATION
- Applicant Address: JP Tokyo
- Assignee: JSR CORPORATION
- Current Assignee: JSR CORPORATION
- Current Assignee Address: JP Tokyo
- Agency: Element IP, PLC
- Priority: JPJP2016-134633 20160706
- Main IPC: G03F7/00
- IPC: G03F7/00 ; C08F212/08 ; C08F212/14 ; C08F220/12 ; C08F220/14 ; C09D201/02 ; H01L21/027 ; H01L21/308 ; C09D133/10 ; G03F7/38 ; C09D153/00

Abstract:
A composition for film formation includes a polymer and a solvent. The polymer includes a first repeating unit, a second repeating unit, a third repeating unit, and a structural unit on at least one end of a main chain of the polymer. The first repeating unit includes a crosslinkable group. The second repeating unit differs from the first repeating unit. The third repeating unit differs from the first repeating unit and has higher polarity than polarity of the second repeating unit. The structural unit includes an interacting group capable of interacting with Si—OH, Si—H or Si—N.
Public/Granted literature
- US20190233561A1 COMPOSITION FOR FILM FORMATION, FILM-FORMING METHOD AND DIRECTED SELF-ASSEMBLY LITHOGRAPHY PROCESS Public/Granted day:2019-08-01
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