- Patent Title: Insulation layer arrangement for magnetic tunnel junction device
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Application No.: US17018539Application Date: 2020-09-11
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Publication No.: US11462584B2Publication Date: 2022-10-04
- Inventor: Yoonsung Han , Seung Pil Ko
- Applicant: SAMSUNG ELECTRONICS CO., LTD.
- Applicant Address: KR Suwon-si
- Assignee: SAMSUNG ELECTRONICS CO., LTD.
- Current Assignee: SAMSUNG ELECTRONICS CO., LTD.
- Current Assignee Address: KR Suwon-si
- Agency: Sughrue Mion, PLLC
- Priority: KR10-2017-0069777 20170605
- Main IPC: H01L27/22
- IPC: H01L27/22 ; H01L43/10 ; H01L43/02 ; H01L23/532 ; G11C11/16 ; H01L43/12

Abstract:
Disclosed are a semiconductor device and a method of manufacturing the same. The semiconductor device comprises a substrate including a cell region and a peripheral region, a magnetic tunnel junction pattern on the cell region, a capping insulation layer covering a sidewall of the magnetic tunnel junction pattern, and an upper insulation layer including a first portion on the capping insulation layer and a second portion on the peripheral region. A level of a bottom surface of the second portion is lower than that of a bottom surface of the capping insulation layer.
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