- 专利标题： System and method for evacuating a process space
-
申请号： US16748281申请日： 2020-01-21
-
公开(公告)号： US11473573B2公开(公告)日： 2022-10-18
- 发明人: Gunther Bermich
- 申请人： MAN Energy Solutions SE
- 申请人地址： DE Augsburg
- 专利权人： MAN Energy Solutions SE
- 当前专利权人： MAN Energy Solutions SE
- 当前专利权人地址： DE Augsburg
- 代理机构： Cozen O'Connor
- 优先权： DE102019101769.6 20190124
- 主分类号： F04B49/00
- IPC分类号： F04B49/00 ; F04B41/06 ; F04B49/06 ; F04B49/22 ; F04B49/02 ; F04B49/03 ; F04B25/00 ; F04B23/00 ; F04C23/00 ; F04C25/02 ; F04B37/14 ; F04D15/00 ; F04D17/14 ; F04D27/02
摘要：
A method for evacuating a process space by initially evacuating the process space to a pressure limit value using two compressors operated in parallel, and on reaching or undershooting the pressure limit value, the process space is subsequently evacuated using the two compressors operated in series.
公开/授权文献
- US20200240405A1 System And Method For Evacuating A Process Space 公开/授权日：2020-07-30
信息查询
