- 专利标题: Three-dimensional memory devices and fabricating methods thereof
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申请号: US17112045申请日: 2020-12-04
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公开(公告)号: US11476277B2公开(公告)日: 2022-10-18
- 发明人: Lei Ding , Jing Gao , Chuan Yang , Lan Fang Yu , Ping Yan , Sen Zhang , Bo Xu
- 申请人: Yangtze Memory Technologies Co., Ltd.
- 申请人地址: CN Hubei
- 专利权人: Yangtze Memory Technologies Co., Ltd.
- 当前专利权人: Yangtze Memory Technologies Co., Ltd.
- 当前专利权人地址: CN Hubei
- 代理机构: Sterne, Kessler, Goldstein & Fox P.L.L.C.
- 优先权: CN201711138366.5 20171116
- 主分类号: H01L27/1157
- IPC分类号: H01L27/1157 ; H01L27/11582 ; H01L27/11524 ; H01L27/11556
摘要:
A method for forming a gate structure of a 3D memory device is provided. The method comprises: forming, on a substrate, an alternating dielectric stack including a plurality of dielectric layer pairs, each of the plurality of dielectric layer pairs comprising a first dielectric layer and a second dielectric layer different from the first dielectric layer; forming a slit penetrating vertically through the alternating dielectric stack and extending in a horizontal direction; removing the plurality of second dielectric layers in the alternating dielectric stack through the slit to form a plurality of horizontal trenches; forming a gate structure in each of the plurality of horizontal trenches; forming a spacer layer on sidewalls of the slit to cover the gate structures, wherein the spacer layer has a laminated structure; and forming a conductive wall in the slit, wherein the conductive wall is insulated from the gate structures by the spacer layer.
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