- 专利标题: Back side illuminated image sensor with reduced sidewall-induced leakage
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申请号: US16728018申请日: 2019-12-27
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公开(公告)号: US11476295B2公开(公告)日: 2022-10-18
- 发明人: Shuang-Ji Tsai , Dun-Nian Yaung , Jen-Cheng Liu , Wen-De Wang , Hsiao-Hui Tseng
- 申请人: Taiwan Semiconductor Manufacturing Company, Ltd.
- 申请人地址: TW Hsin-Chu
- 专利权人: Taiwan Semiconductor Manufacturing Company, Ltd.
- 当前专利权人: Taiwan Semiconductor Manufacturing Company, Ltd.
- 当前专利权人地址: TW Hsin-Chu
- 代理机构: Haynes and Boone, LLP
- 主分类号: H01L27/00
- IPC分类号: H01L27/00 ; H01L27/146 ; H01L23/48 ; H01L23/00 ; H01L23/525
摘要:
Provided is a method of fabricating an image sensor device. An exemplary includes forming a plurality of radiation-sensing regions in a substrate. The substrate has a front surface, a back surface, and a sidewall that extends from the front surface to the back surface. The exemplary method further includes forming an interconnect structure over the front surface of the substrate, removing a portion of the substrate to expose a metal interconnect layer of the interconnect structure, and forming a bonding pad on the interconnect structure in a manner so that the bonding pad is electrically coupled to the exposed metal interconnect layer and separated from the sidewall of the substrate.
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