Invention Grant
- Patent Title: Silicide structure of an integrated transistor device and method of providing same
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Application No.: US16957055Application Date: 2018-02-08
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Publication No.: US11476334B2Publication Date: 2022-10-18
- Inventor: Orb Acton , Joseph Steigerwald , Anand Murthy , Scott Maddox , Jenny Hu
- Applicant: Intel Corporation
- Applicant Address: US CA Santa Clara
- Assignee: Intel Corporation
- Current Assignee: Intel Corporation
- Current Assignee Address: US CA Santa Clara
- Agency: Essential Patents Group, LLP
- International Application: PCT/US2018/017411 WO 20180208
- International Announcement: WO2019/156673 WO 20190815
- Main IPC: H01L29/10
- IPC: H01L29/10 ; H01L21/28 ; H01L29/417 ; H01L29/49 ; H01L29/66 ; H01L29/78

Abstract:
Techniques and mechanisms for providing functionality of a transistor which comprises a conformal layer of a gate work function silicide. In an embodiment, the transistor comprises a channel region and a gate dielectric which extends and adjoins the channel region. The gate dielectric also adjoins a layer structure of the transistor, the layer structure comprising a silicide. The silicide includes silicon and a component D which comprises a non-metal element from one of Groups IIIa, IVa, or Va. In another embodiment, the silicide further comprises a component M which includes a transition metal element from one of Groups IVb, Vb, VIb, VIIB, or VIIIb and/or which includes a metal element from one of Groups IIIa, IVa, or Va.
Public/Granted literature
- US20200343343A1 SILICIDE STRUCTURE OF AN INTEGRATED TRANSISTOR DEVICE AND METHOD OF PROVIDING SAME Public/Granted day:2020-10-29
Information query
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