Invention Grant
- Patent Title: Semiconductor device
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Application No.: US17105868Application Date: 2020-11-27
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Publication No.: US11476341B2Publication Date: 2022-10-18
- Inventor: Ju Youn Kim , Sang Jung Kang , Jin Woo Kim , Seul Gi Yun
- Applicant: Samsung Electronics Co., Ltd.
- Applicant Address: KR Suwon-si
- Assignee: Samsung Electronics Co., Ltd.
- Current Assignee: Samsung Electronics Co., Ltd.
- Current Assignee Address: KR Suwon-si
- Agency: Muir Patent Law, PLLC
- Priority: KR10-2020-0045834 20200416
- Main IPC: H01L29/417
- IPC: H01L29/417 ; H01L29/06 ; H01L29/786

Abstract:
A semiconductor device is provided. The semiconductor device includes a substrate including a first region and a second region, a first gate structure extending in a first direction on the first region of the substrate, the first gate structure including a first gate insulation film and a first work function film disposed on the first gate insulation film, and a second gate structure extending in the first direction on the second region of the substrate, the second gate structure including a second gate insulation film and a second work function film disposed on the second gate insulation film, wherein a first thickness of the first work function film in a second direction intersecting the first direction is different from a second thickness of the second work function film in the second direction, and wherein a first height of the first work function film in a third direction perpendicular to the first and second directions is different from a second height of the second work function film in the third direction.
Public/Granted literature
- US20210328030A1 SEMICONDUCTOR DEVICE Public/Granted day:2021-10-21
Information query
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