Invention Grant
- Patent Title: Semiconductor device and method for fabricating the same
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Application No.: US17204961Application Date: 2021-03-18
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Publication No.: US11476411B2Publication Date: 2022-10-18
- Inventor: Chen-Yi Weng , Jing-Yin Jhang
- Applicant: UNITED MICROELECTRONICS CORP.
- Applicant Address: TW Hsin-Chu
- Assignee: UNITED MICROELECTRONICS CORP.
- Current Assignee: UNITED MICROELECTRONICS CORP.
- Current Assignee Address: TW Hsin-Chu
- Agent Winston Hsu
- Priority: CN201811044897.2 20180907
- Main IPC: H01L43/02
- IPC: H01L43/02 ; H01L43/12 ; H01F10/32 ; H01F41/34 ; H01L23/528 ; H01L21/768 ; H01L27/22 ; H01L23/522 ; H01L43/10

Abstract:
A method for fabricating semiconductor device includes the steps of: forming a magnetic tunneling junction (MTJ) on a substrate; forming a liner on the MTJ; removing part of the liner to form a recess exposing the MTJ; and forming a conductive layer in the recess, wherein top surfaces of the conductive layer and the liner are coplanar. Preferably the MTJ further includes: a bottom electrode on the substrate, a fixed layer on the bottom electrode, and a top electrode on the fixed layer, in which the conductive layer and the top electrode are made of same material.
Public/Granted literature
- US20210202828A1 SEMICONDUCTOR DEVICE AND METHOD FOR FABRICATING THE SAME Public/Granted day:2021-07-01
Information query
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