Systems and techniques providing suitable chip structures for facilitating antenna-based thermal annealing of qubits are provided. In one example, a radio frequency emitter can comprise a voltage-controlled oscillator and an antenna. The voltage-controlled oscillator can receive power-on signals from a microcontroller, thereby causing the voltage-controlled oscillator to generate an electromagnetic wave. The antenna can then direct the electromagnetic wave onto a set of one or more capacitor pads of a Josephson junction on a superconducting qubit chip, thereby annealing the Josephson junction. In another example, a voltage regulator and a digital-to-analog converter or digital-to-digital converter can be coupled in series between the microcontroller and the voltage-controlled oscillator, thereby allowing the voltage-controlled oscillator to be voltage and/or frequency tunable and eliminating the need for external power routing as compared to photonic laser annealing. In yet another example, a bipolar-junction and complementary metal-oxide semiconductor stack construction can be employed.