Invention Grant
- Patent Title: Shutter disk having lamp, power, and/or gas modules arranged at the first side of the shutter disk of thin film deposition chamber
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Application No.: US16657832Application Date: 2019-10-18
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Publication No.: US11492700B2Publication Date: 2022-11-08
- Inventor: Wen-Hao Cheng , Yen-Yu Chen , Yi-Ming Dai
- Applicant: Taiwan Semiconductor Manufacturing Co., Ltd.
- Applicant Address: TW Hsinchu
- Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
- Current Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
- Current Assignee Address: TW Hsinchu
- Agency: Seed IP Law Group LLP
- Main IPC: C23C16/02
- IPC: C23C16/02 ; C23C16/458 ; C23C14/34 ; C23C14/02 ; C23C16/46 ; C23C16/34

Abstract:
The present disclosure provides a multifunction chamber having a multifunctional shutter disk. The shutter disk includes a lamp device, a DC/RF power device, and a gas line on one surface of the shutter disk. With this configuration, simplifying the chamber type is possible as the various specific, dedicated chambers such as a degas chamber, a pre-clean chamber, a CVD/PVD chamber are not required. By using the multifunctional shutter disk, the degassing function and the pre-cleaning function are provided within a single chamber. Accordingly, a separate degas chamber and a pre-clean chamber are no longer required and the overall transfer time between chambers is reduced or eliminated.
Public/Granted literature
- US20210115554A1 MULTI-FUNCTIONAL SHUTTER DISK FOR THIN FILM DEPOSITION CHAMBER Public/Granted day:2021-04-22
Information query
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