Invention Grant
- Patent Title: Method for measuring a height map of a test surface
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Application No.: US17119246Application Date: 2020-12-11
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Publication No.: US11493330B2Publication Date: 2022-11-08
- Inventor: Hendrik Ketelaars , Adriaan Tiemen Zuiderweg , Lukasz Redlarski , John Quaedackers
- Applicant: MITUTOYO CORPORATION
- Applicant Address: JP Kanagawa
- Assignee: MITUTOYO CORPORATION
- Current Assignee: MITUTOYO CORPORATION
- Current Assignee Address: JP Kanagawa
- Agency: Greenblum & Bernstein, P.L.C.
- Priority: EP19216041 20191213
- Main IPC: G01B11/25
- IPC: G01B11/25 ; G01B11/22 ; G01N21/55 ; G01N21/956 ; G01B11/06

Abstract:
A method for measuring a height map of a test surface having a varying reflectivity using a multi-sensor apparatus including a pre-scan sensor and a height measuring sensor is disclosed. The multi-sensor apparatus further comprises one or more light sources configured to illuminate the test surface and a spatial light modulator. The spatial light modulator is placed in a light path between the one or more light sources and a measuring location of the multi-sensor apparatus and is configured to modulate light emitted from at least one of the light sources. The method comprises performing a measurement for determining an illumination intensity map of the test surface and a measurement for performing a height map of the test surface.
Public/Granted literature
- US20210180943A1 METHOD FOR MEASURING A HEIGHT MAP OF A TEST SURFACE Public/Granted day:2021-06-17
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