公开(公告)号：US11493330B2

公开(公告)日：2022-11-08

申请号：US17119246

申请日：2020-12-11

Applicant: MITUTOYO CORPORATION

Inventor： Hendrik Ketelaars ,  Adriaan Tiemen Zuiderweg ,  Lukasz Redlarski ,  John Quaedackers

IPC: G01B11/25 ,  G01B11/22 ,  G01N21/55 ,  G01N21/956 ,  G01B11/06

Abstract: A method for measuring a height map of a test surface having a varying reflectivity using a multi-sensor apparatus including a pre-scan sensor and a height measuring sensor is disclosed. The multi-sensor apparatus further comprises one or more light sources configured to illuminate the test surface and a spatial light modulator. The spatial light modulator is placed in a light path between the one or more light sources and a measuring location of the multi-sensor apparatus and is configured to modulate light emitted from at least one of the light sources. The method comprises performing a measurement for determining an illumination intensity map of the test surface and a measurement for performing a height map of the test surface.