Invention Grant
- Patent Title: Organometallic solution based high resolution patterning compositions and corresponding methods
-
Application No.: US17085024Application Date: 2020-10-30
-
Publication No.: US11500284B2Publication Date: 2022-11-15
- Inventor: Stephen T. Meyers , Jeremy T. Anderson , Joseph B. Edson , Kai Jiang , Douglas A. Keszler , Michael K. Kocsis , Alan J. Telecky , Brian J. Cardineau
- Applicant: Inpria Corporation
- Applicant Address: US OR Corvallis
- Assignee: Inpria Corporation
- Current Assignee: Inpria Corporation
- Current Assignee Address: US OR Corvallis
- Agency: Christensen, Fonder, Dardi & Herbert PLLC
- Agent Diane E. Bennett; Peter S. Dardi
- Main IPC: G03F7/004
- IPC: G03F7/004 ; G03F7/32 ; G03F7/20

Abstract:
Organometallic radiation resist compositions are described based on tin ions with alkyl ligands. Some of the compositions have branched alkyl ligands to provide for improved patterning contrast while maintaining a high degree of solution stability. Blends of compounds with distinct alkyl ligands can provide further improvement in the patterning. High resolution patterning with a half-pitch of no more than 25 nm can be achieved with a line width roughness of no more than about 4.5 nm. Synthesis techniques have been developed that allow for the formation of alkyl tin oxide hydroxide compositions with very low metal contamination.
Public/Granted literature
- US20210048745A1 ORGANOMETALLIC SOLUTION BASED HIGH RESOLUTION PATTERNING COMPOSITIONS AND CORRESPONDING METHODS Public/Granted day:2021-02-18
Information query
IPC分类: