Invention Grant
- Patent Title: Semiconductor devices having air spacer
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Application No.: US17028763Application Date: 2020-09-22
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Publication No.: US11508732B2Publication Date: 2022-11-22
- Inventor: Jihee Kim , Yeongshin Park , Hyunchul Yoon , Joonghee Kim , Jungheun Hwang
- Applicant: Samsung Electronics Co., Ltd.
- Applicant Address: KR Suwon-si
- Assignee: Samsung Electronics Co., Ltd.
- Current Assignee: Samsung Electronics Co., Ltd.
- Current Assignee Address: KR Suwon-si
- Agency: Muir Patent Law, PLLC
- Priority: KR10-2020-0000487 20200102
- Main IPC: H01L27/108
- IPC: H01L27/108 ; H01L21/768 ; H01L29/66 ; H01L21/764

Abstract:
A semiconductor device includes bit line structures disposed on a substrate, each bit line structure comprising a bit line and an insulating spacer structure, buried contacts which fill lower portions of spaces between bit line structures in the substrate, and landing pads which fill upper portions of the spaces, extend from upper surfaces of the buried contacts to upper surfaces of the bit line structures, and are spaced apart from each other by insulating structures. A first insulating structure is disposed between a first landing pad and a first bit line structure. The first insulating structure includes a sidewall extending along a sidewall of the first landing pad toward the substrate. In a direction extending toward the substrate, the sidewall of the first insulating structure gets closer to a first sidewall of the first bit line structure.
Public/Granted literature
- US20210210493A1 SEMICONDUCTOR DEVICES HAVING AIR SPACER Public/Granted day:2021-07-08
Information query
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