- Patent Title: Integrated assemblies, and methods of forming integrated assemblies
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Application No.: US17119129Application Date: 2020-12-11
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Publication No.: US11508734B2Publication Date: 2022-11-22
- Inventor: Amirhasan Nourbakhsh , John K. Zahurak , Sanh D. Tang , Silvia Borsari , Hong Li
- Applicant: Micron Technology, Inc.
- Applicant Address: US ID Boise
- Assignee: Micron Technology, Inc.
- Current Assignee: Micron Technology, Inc.
- Current Assignee Address: US ID Boise
- Agency: Wells St. John P.S.
- Main IPC: H01L27/108
- IPC: H01L27/108 ; H01L29/78 ; H01L29/66

Abstract:
Some embodiments include an integrated assembly having digit lines extending along a first direction, and rails over the digit lines. The rails include semiconductor-material pillars alternating with intervening insulative regions. The rails have upper, middle and lower segments. A first insulative material is along the upper and lower segments of the rails. A second insulative material is along the middle segments of the rails. The second insulative material differs from the first insulative material in one or both of thickness and composition. Conductive gate material is along the middle segments of the rails and is spaced from the middle segments by the second insulative material. Channel regions are within the middle segments of the pillars, upper source/drain regions are within the upper segments of the pillars and lower source/drain regions are within the lower segments of the pillars. Some embodiments include methods of forming integrated assemblies.
Public/Granted literature
- US20210098463A1 Integrated Assemblies, and Methods of Forming Integrated Assemblies Public/Granted day:2021-04-01
Information query
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