Invention Grant
- Patent Title: Vacuum pump
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Application No.: US14912434Application Date: 2014-06-06
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Publication No.: US11512705B2Publication Date: 2022-11-29
- Inventor: Hideki Omori
- Applicant: Edwards Japan Limited
- Applicant Address: JP Yachiyo
- Assignee: Edwards Japan Limited
- Current Assignee: Edwards Japan Limited
- Current Assignee Address: JP Yachiyo
- Agency: Shumaker & Sieffert, P.A.
- Priority: JPJP2013-179431 20130830
- International Application: PCT/JP2014/065153 WO 20140606
- International Announcement: WO2015/029536 WO 20150305
- Main IPC: F04D25/06
- IPC: F04D25/06 ; F04D17/16 ; F04D29/42 ; F04D29/28 ; H02K11/33 ; F04D19/04 ; F16C32/04

Abstract:
The present disclosure provides a vacuum pump with which size and weight reduction, improvement of workability, and cost reduction can be realized. Electrical connection between a pump main body that has a rotor supported by a magnetic bearing and a control unit that controls the drive of the pump main body is established by a flexible printed wiring board configured by printing an electric circuit on a surface of a sheet-like insulating substrate.
Public/Granted literature
- US20160195098A1 VACUUM PUMP Public/Granted day:2016-07-07
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