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公开(公告)号：US20160312826A1
公开(公告)日：2016-10-27
申请号：US15028095
申请日：2014-09-10
发明人： Toshiaki Kawashima , Isao Nakagawa
CPC分类号： F16C32/0402 , F01D25/16 , F04D19/042 , F04D19/048 , F04D27/00 , F04D29/058 , F04D29/059 , F05D2240/30 , F05D2240/511 , F05D2240/515 , F05D2260/941 , F16C19/06 , F16C32/0442 , F16C39/02 , F16C2300/62 , F16C2360/45
摘要： To provide a protective bearing, a bearing unit, and a vacuum pump that are configured to prevent a touchdown bearing from co-rotating with the rotation of a rotor that is supported in a levitated state and a non-contact state. Slits are formed in the radial direction at four sections on the inner side of a securing member. A pair of permanent magnets of the same polarity is fixed to the upper surface of each of the four regions partitioned by the slits. The inner rim of the securing member has projections that are formed circumferentially downward. An attractive force is generated between an outer ring and an inner ring. An attractive force is also generated between the projections projecting toward the inner end of the securing member and the inner ring. Due to this configuration, even when a rotational torque is applied to the inner ring of the touchdown bearing as a result the rotation of the rotating body, co-rotation of the inner ring does not occur due to a large holding torque.
摘要翻译： 提供一种保护轴承，轴承单元和真空泵，其构造成防止触地轴承随着处于悬浮状态和非接触状态的转子的旋转而共旋转。 在固定部件的内侧的四个部位沿径向形成狭槽。 一对具有相同极性的永磁体被固定在由狭缝分隔的四个区域中的每一个的上表面上。 固定构件的内缘具有周向形成的突起。 在外环和内圈之间产生吸引力。 在朝向固定构件的内端突出的突起与内圈之间也产生吸引力。 由于这种构造，即使当转向力矩被施加到触地轴承的内圈时，由于旋转体的旋转，即使由于大的保持转矩而不会发生内圈的共同转动。
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公开(公告)号：US20240352937A1
公开(公告)日：2024-10-24
申请号：US18293628
申请日：2022-08-23
发明人： Takaaki Ono
IPC分类号： F04D19/04 , F04D29/058 , F16C32/04
CPC分类号： F04D19/048 , F04D29/058 , F16C32/0451 , F16C32/048
摘要： A magnetic bearing device and a vacuum pump configured to measure with high sensitivity a natural vibration mode of a rotating body in a floating system using a magnetic bearing. The natural vibration to be measured is a bending mode of the rotating body, a natural vibration mode of the rotor blades, a vibration mode associated with the stator, and a rigid body mode of the rotating body. The natural vibration may be computed by a central processing unit (CPU) of a control device or may be computed externally. In this manner, the natural vibration mode can be detected with high sensitivity.
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公开(公告)号：US20240337266A1
公开(公告)日：2024-10-10
申请号：US18700064
申请日：2022-11-09
发明人： Takashi Kabasawa
CPC分类号： F04D19/042 , F04D19/044 , F04D29/5853
摘要： A vacuum pump and a heat insulating member for the vacuum pump are provided that improve the rigidity and heat insulating effect of a heat insulating portion and facilitate the control of intended temperatures of components within the pump. A turbomolecular pump having at least a cooling function includes a heat insulator that is disposed on a threaded spacer and has a hollow structure including cavities extending in the axial direction.
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公开(公告)号：US12060885B2
公开(公告)日：2024-08-13
申请号：US17632582
申请日：2020-08-17
发明人： Yongwei Shi
CPC分类号： F04D19/04 , F16C32/0446 , F16C32/0461 , H02K11/014 , H02K11/21 , H02K2211/03
摘要： An electromagnet unit in which influence of a noise on a displacement sensor is suppressed and which can be installed in a space-saving manner and a vacuum pump including the electromagnet unit are provided. An electromagnet unit includes a radial electromagnet which controls a shaft to a predetermined position, a radial sensor which detects a position of the shaft, and a printed board interposed between the radial electromagnet and the radial sensor and on which a wiring pattern for sensor connecting coils of the corresponding two radial sensors to each other and a wiring pattern connecting coils of the corresponding two radial electromagnets to each other are provided. The wiring pattern for sensor and the wiring pattern for electromagnet are disposed so as not to overlap when seen from the axial direction.
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公开(公告)号：US20240254994A1
公开(公告)日：2024-08-01
申请号：US18561819
申请日：2022-06-09
发明人： Yoshiyuki Sakaguchi
CPC分类号： F04D19/042 , F04D27/006 , F04D29/584 , F04D19/048 , F05D2270/303
摘要： To obtain a vacuum pump which appropriately performs temperature management of a gas flow path and reduces restrictions on a gas flow rate attributable to the temperature management. A cooling tube performs temperature adjustment of a gas flow path. A first temperature sensor is arranged at a position closer to the gas flow path than the cooling tube, a second temperature sensor is arranged at a position closer to the cooling tube than the gas flow path, and a control apparatus controls, based on a sensor signal of the first temperature sensor and a sensor signal of the second temperature sensor, (an on-off valve of) the cooling tube so that a temperature of the gas flow path approaches a predetermined gas flow path target temperature.
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公开(公告)号：US11994137B2
公开(公告)日：2024-05-28
申请号：US17762992
申请日：2020-09-18
发明人： Tooru Miwata , Yoshiyuki Takai
IPC分类号： F04D19/04 , F04D29/053 , F04D29/10 , F04D29/58
CPC分类号： F04D19/042 , F04D29/053 , F04D29/102 , F04D29/584
摘要： A vacuum pump which suppresses occurrence of deposition caused by an exhaust gas is obtained. The vacuum pump includes: a pump portion including a shaft portion, a rotor disposed on an outer peripheral side of the shaft portion, and a stator disposed on the outer peripheral side of the rotor; a channel of the exhaust gas from the pump portion to an outlet port; and a shielding portion which suppresses contact of the exhaust gas with the shaft portion in the channel. Further, an end portion of the shielding portion has a surface opposed to the rotor.
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公开(公告)号：US20240141906A1
公开(公告)日：2024-05-02
申请号：US18547938
申请日：2022-03-11
发明人： Toshiki Yamaguchi
CPC分类号： F04D17/168 , F04D29/28 , F04D29/4206
摘要： A vacuum pump is provided with which, even in the event of breakage of a rotor blade, broken pieces of the rotor blade are unlikely to scatter from an outlet port. A vacuum pump includes a rotor blade configured to rotate about a vertical axis and a casing housing the rotor blade, and is configured to exhaust sucked gas in a radial direction of the rotor blade by rotation of the rotor blade. An outlet port for the gas is provided at a position that is offset from a position of a gas exit portion of the rotor blade in a direction of the vertical axis.
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公开(公告)号：US20240026889A1
公开(公告)日：2024-01-25
申请号：US18254581
申请日：2021-12-03
CPC分类号： F04D19/042 , F04D19/048 , F04D29/5853
摘要： There is obtained a vacuum pump which suppresses an influence on external piping caused by a contact failure of a rotor during rotation of the rotor. A temperature rise ring 301 is provided in the vacuum pump, an outlet port 133 to which the external piping is connected is connected to the temperature rise ring 301, and a rotational force is directly or indirectly applied to the temperature rise ring 301 due to the contact failure of the rotor during the rotation of the rotor. In addition, a rotation suppression means (a hole 301a and a bolt 305) for suppressing rotation of the temperature rise ring 301 by the above-described rotational force is provided separately from a connection portion between the temperature rise ring 301 and a casing (outer tube 127a).
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公开(公告)号：US20240011495A1
公开(公告)日：2024-01-11
申请号：US18042004
申请日：2021-09-03
IPC分类号： F04D19/04
CPC分类号： F04D19/042
摘要： A vacuum pump that includes: an outer cylinder having an inlet port and an outlet port; a rotor shaft rotationally supported inside the outer cylinder; rotor blades in multiple stages, the rotor blades being rotatable together with the rotor shaft; stator blades in multiple stages, the stator blades being fixed to the outer cylinder and located respectively between the rotor blades in multiple stages; and a cooling-side stator and a heating-side stator that hold the stator blades in multiple stages at predetermined intervals. An opening of a gap of a predetermined width configured to provide thermal insulation between the cooling-side stator and the heating-side stator is located at a position where the opening does not face outer circumference surfaces of the rotor blades in an axial direction of the rotating body.
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公开(公告)号：US20230417250A1
公开(公告)日：2023-12-28
申请号：US18250333
申请日：2021-10-29
发明人： Haruki Suzuki
IPC分类号： F04D19/04
CPC分类号： F04D19/044
摘要： A vacuum pump having excellent exhaust performance is provided. The vacuum pump includes a Siegbahn type exhaust mechanism portion 201 in which a Siegbahn spiral groove portion 262 is provided in at least either rotating discs 220a to 220c or stator discs 219a and 219b, and a Holweck type exhaust mechanism portion 301 in which a thread groove 131a is provided in at least either a cylindrical portion 102d of a rotating body 103 or a threaded spacer 131, and the Holweck type exhaust mechanism portion 301 is located on the downstream side of the Siegbahn type exhaust mechanism portion 201. The Holweck type exhaust mechanism portion 301 has a flow passage depth that is continuously constant at a predetermined depth H2, and the Siegbahn type exhaust mechanism portion 201 includes a region that is continuously constant at the predetermined depth H2 from a predetermined position.
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