Invention Grant
- Patent Title: Liquid cooling through conductive interconnect
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Application No.: US16379619Application Date: 2019-04-09
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Publication No.: US11515232B2Publication Date: 2022-11-29
- Inventor: Chia-Pin Chiu , Robert Sankman , Pooya Tadayon
- Applicant: Intel Corporation
- Applicant Address: US CA Santa Clara
- Assignee: Intel Corporation
- Current Assignee: Intel Corporation
- Current Assignee Address: US CA Santa Clara
- Agency: Schwabe, Williamson & Wyatt, P.C.
- Main IPC: H01L23/473
- IPC: H01L23/473 ; H05K7/20 ; H01L23/373 ; H01L23/367 ; H01L23/00

Abstract:
Embodiments include semiconductor packages and cooling semiconductor packaging systems. A semiconductor package includes a second die on a package substrate, first dies on the second die, conductive bumps between the first dies and the second die, a cold plate and a manifold over the first dies, second die, and package substrate, and first openings in the manifold. The first openings are fluidly coupled through the conductive bumps. The semiconductor package may include a first fluid path through the first openings of the manifold, where a first fluid flows through the first fluid path. The semiconductor package may further include a second fluid path through second openings of the cold plate, where a second fluid flows through the second fluid path, and where the first and second fluids of the first and second fluid paths cool heat providing surfaces of the first dies, the second die, or the package substrate.
Public/Granted literature
- US20200328139A1 LIQUID COOLING THROUGH CONDUCTIVE INTERCONNECT Public/Granted day:2020-10-15
Information query
IPC分类: